What does silicon accelerometers use for proof mass sensing and for rebalancing?

A)
Pivot
B)
Flexure
C)
Metalised wafers
D)
Single crystal silicon frame

Correct Answer :   Metalised wafers


Explanation : The frame, proof mass and hinges are made with single crystal silicon. Metalised wafers are used to enclose this and also serve as electrodes for sensing proof mass and rebalancing.